Martin Schellenberger - Fraunhofer IISB
450 mm or There and Back Again – Synergies of 450 mm innovations with 200/300 mm semiconductor manufacturing
Researchers and engineers around the world work hard on novel techniques and innovations to make 450 mm manufacturing come true. Yet, while 450 mm lines will be introduced later than some stakeholders expected, the synergies of 450 mm innovations with 200/300 mm semiconductor manufacturing (and vice versa) become more interesting. In this presentation, we will go on a journey THERE (to 450 mm challenges and innovations) AND BACK AGAIN (discussing synergies with 200/300 mm manufacturing):
The presentation will highlight some of the challenges and innovations that will enable 450 mm manufacturing. Coming from there, synergies – already existing and those to come – between 450 mm developments and 200/300 mm manufacturing will be discussed. The focus here is on the “More-than-Moore” domain, which is the important one for most European IC manufacturers. Specific attention will be turned to the aspects of “manufacturing science”, and the strategic role the semiconductor industry can play here.
Martin Schellenberger joined the department of Semiconductor Manufacturing Equipment and Methods at the Fraunhofer Institute of Integrated Systems and Device Technology (IISB) in 1998. Since 2007 he is Group Manager at Fraunhofer IISB, responsible for equipment and advanced process control. His research interests include equipment development and optimization for semiconductor processes, manufacturing science solutions for quality control, predictive methods for process control, equipment automation and productivity enhancement. He is the leader of the European SEMI Process Control Systems task force.
He received the diploma in electrical engineering in 1998 and a Ph.D. in electrical engineering in 2011, both from the University of Erlangen-Nuremberg, Germany.