| Towards Etch Chuck Failure Predictability |
Thomas Ashby |
Imec |
oral |
| Automatic generation of APC Keynumbers based on anomaly detection for Al wire bonding |
Jan Papadoudis |
Infineon Technologies AG |
oral |
| Why do I need a Digital Twin anyway? |
Malte Moura |
INFICON GmbH |
oral |
| Advanced Gas and Chemical Distribution Management |
Jochen Kinauer |
camLine GmbH |
oral |
| Smart Virtual Collaboration to Optimize the Development Process in Semiconductor Industry |
Germar Schneider |
Infineon Technologies Dresden GmbH & Co. KG |
oral |
| Machine learning for cluster tool throughput optimizat |
Doug Suerich |
PEER Group |
oral |
| Two new methods for process control which take into account big data context consequences |
Francois Bergeret |
IPPON INNOVATION |
oral |
| Conflict Avoidance Strategies for Automated Guided Vehicles in Semiconductor Fabrication Facilities |
Karl-Benedikt Reith |
Technische Universität Dresden |
oral |
| Simulation versus Scheduling in Semiconductor Manufacturing – Some General Considerations and where (Artificial) Intelligence Could Possibly Help |
Peter Lendermann |
D-SIMLAB Technologies GmbH |
oral |
| Enhancing Design-relevant Document Search and Visibility through Fusion of Multi-sourced Data in Knowledge Graphs |
Hasan Abu Rasheed |
University of Siegen |
oral |
| The Benefits of Cloud Analytics in Semiconductor – A Real-time Application Case Study |
Joe Lee |
BISTel America |
oral |
| Real Time Data Display by Deployment of StreamSheets using FDC logfiles |
Dennis Föh |
TDK-Micronas GmbH |
oral |
| A Gaussian Process Regression Metamodel for Pattern Recognition in Current-Voltage Parameters of PERC Solar Cells |
Gerd Fischer |
Hochschule Zittau/Görlitz |
oral |
| How to integrate agile a tool into a MES |
Bert Müller |
Kontron AIS GmbH |
oral |
| Implementation of a simple RF related FDC strategy on AMAT Producer DXZ chambers to ensure a controlled process environment |
Armin Domitner |
ams AG |
poster |
| Enhanced PVD Preclean process control by combining SPC equipment checks with inline etch rate calculation by FDC |
Christina Wappl |
ams AG |
poster |
| Development and evaluation of a Blockchain concept for the IFD 300 mm Pre-Assembly Line |
Germar Schneider |
Infineon Technologies Dresden GmbH & Co. KG |
poster |
| Vibration Measurement and Visualization in Semiconductor AMHS |
Thomas Wagner |
TU Dresden |
poster |
| Overcoming Root Cause Analysis Challenges with Trace Analytics |
Joe Lee |
BISTel America |
poster |
| Common Data Extraction Layer for Root Cause Investigation in Semiconductor FAB |
Peter Czerner |
Elmos Semiconductor AG |
poster |
| Wafer defect map classification using convolutional neural network |
Irene Bianchi |
ST Microelectronics |
poster |
| Equipment Integration within minutes |
Bert Müller |
Kontron AIS GmbH |
poster |
