<<TITEL>>

<<Name>>1, <<Name>>2

1 <<Company 1>>
2 <<Company 2>>

Presenter:	<<Name of Presenter>>
E-mail:	<<email>>

Presentation (oral and/or poster):

TOPIC:
Please select one or more fitting topic(s) for your contribution from the list. (1=first, 2=second etc. choice)

Process Level APC Plasma etch,CVD and ALD Sputtering, P3I, and e--beam Lithography Thermal, wet processing & CMP Backend Metrology and R2R APC for legacy tools	Fab Level APC Digitization, data analytics, machine learning & AI, digital twin Fab level process control methods Virtual metrology Yield management Factory data analysis IT infrastructure & Equipment integration trends	Manufacturing Effectiveness and Productivity Unit process & equipment productivity Factory productivity and automation Factory modeling, simulation and optimization Cost optimization and end-of-life equipment issues Environment and Green Manufacturing

Motivation

<<TEXT>>

Description

<<TEXT>>

Innovation

<<TEXT>>

Results

<<TEXT>>