Agenda

Plasma Supervision Workshop

Workshop Overview

Aim: To learn about complementary plasma sensors in a manufacturing environment.

Experts from Intel, TDK-Micronas and plasma sensor suppliers share their know-how on using plasma sensors in a manufacturing environment.

The use of complementary plasma sensors supports better fault detection and is often mandatory for effective fault classification. Rapid chamber conditioning and chamber matching are also highlighted during this workshop.

Learn how different plasma sensors could be combined and why.

 

When: April 10, 2017 - 10:45

With talks from:

  • Intel
  • Impedans
  • TDK-Micronas
  • Plasmetrex
  • PLASUS