Call for Papers
The Call for Papers for apc|m 2026 is open from September until the end of November. We invite contributions from industry and academia on all aspects of advanced process control and manufacturing effectiveness in the semiconductor and related industries.
Submission Guidelines:
- Please fill out the Word “Abstract Master” in advance.
- Have a speaker photo ready.
- Then go to the submission tool Sessionize and submit your contribution.
- All submissions must be made via Sessionize – please prepare your materials before starting the submission process.
Submit now!
Abstract master
APC|M TOPICS

Process Level APC
- Plasma Based Deposition (PVD, PE-CVD and PE-ALD)
- Plasma etching for Si and compound materials (RIE)
- Classical Deposition (CVD, ALD)
- Plating
- Lithography & Lithography logistic
- Thermal, WET
- CMP
- Epitaxy
- Other unit processes
- Metrology, virtual metrology
- Defect Density Engineering
- Process modelling, simulation, digital twin
- Process control methods at process level, e.g., FDC, Fault Prediction, Run-to-Run Control, Virtual Metrology

Smart Manufacturing
- Digitization, data analytics
- Data quality
- Machine learning & AI
- Digital twin
- Fab level process control methods, R2R
- Yield management
- Factory data analysis
- Equipment integration
- IT infrastructure, IoT, edge-devices, cloud-based systems, quantum computing
- Cybersecurity, data sharing, conversion techniques and blockchain
- Fab level process control methods, e.g., FDC, Fault Prediction, Run-to-Run Control, Virtual Metrology

Manufacturing Effectiveness
- Equipment productivity
- Manufacturing productivity and automation
- Factory modeling and simulation
- Supply chain integration and optimization
- Cost management
- End-of-life equipment challenges
- Material efficiency
- Environment and green manufacturing
- Industry standards, requirements, future needs and roadmaps

Packaging & Smart Integration
- Backend and final test
- Heterogenous Integration
- APC and smart manufacturing solutions in other precision industries such as electronics, pharmaceutical, chemical