Review Agenda 2024
The agenda for the conference in 2025 has not yet been finalized, the new agenda will be published here in the next few weeks!
You can find out the exact presentation times, titles and speakers after clicking on the individual topic blocks.
| 08.00 | Registration 08.00 - 13.00 | ||||||||
| 08.15 | |||||||||
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| 08.45 | |||||||||
| 09.00 | |||||||||
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| 10.00 | |||||||||
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| 11.00 | |||||||||
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| 12.00 | |||||||||
| 12.15 | |||||||||
| 12.30 | |||||||||
| 12.45 | Invited Talk Session Chair: Martin Schellenberger 13.10 - 14.00 MaiMa autofrei - A digital quality gate for tool requalification after maintenance employing MaiMa and Space
Yvonne Bergmann | Robert Bosch GmbH | ||||||||
| 13.00 | |||||||||
| 13.15 | |||||||||
| 13.30 | |||||||||
| 13.45 | |||||||||
| 14.00 | Session 3 - Part 1 Session Chair: Thomas Müller 14.00 - 15.00 3.1 Industry 4.0 boosts predictive maintenance for semiconductor testers
Oleg Fotteler | SPEA GmbH
3.2 Models for Gas Flow Reduction
Michael Klick | Plasmetrex | Session 1 - Part 1 Sponsored by Applied Materials 14.00 - 15.00 1.1 Anthony Martinez | LayTec AG
1.2 John Mc Manus | Nova Ltd Session 1 - Part 11.1 ICP-etching of GaN HFET structures: real time statistical process control of nm-thick GaN layers by means of end point detection
Anthony Martinez | LayTec AG
1.2 Enabling Higher Resolution Measurement to Support Zone Control John Mc Manus | Nova Ltd | |||||||
| 14.15 | |||||||||
| 14.30 | |||||||||
| 14.45 | |||||||||
| 15.00 | Coffee Break 15.00 - 15.30 | ||||||||
| 15.15 | |||||||||
| 15.30 | Session 2 - Part 1 Session Chair: Thomas Müller 15.30 - 16.30 2.1 Sensor Matching Application Concept Using Cloud Storage, Cloud Analytics and Computing Services
Frank Wagenbreth | Globalfoundries
2.2 "Harnessing the Power of Event Sequence Analysis for Semiconductor Smart Manufacturing"
Alan Weber | Cimetrix by PDF Solutions | Session 1 - Part 2 Session Chair: Bert Müller 15.30 - 16.30 1.3 “antiPilo AI”: First-Time-Right Lithography in a High-Mix, Low-Volume FAB using a Machine Learning boosted R2R controller
Martin Schwarz | X-FAB Dresden GmbH & Co. Kg
A Digital Twin of a real fab – how to create it?
Torsten Thieme | Deaxo GmbH | |||||||
| 15.45 | |||||||||
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| 16.15 | |||||||||
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| 17.00 | |||||||||
| 17.15 | |||||||||
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| 17.45 | |||||||||
| 18.00 | Poster Reception 18.00 - 19.00 | ||||||||
| 18.15 | |||||||||
| 18.30 | |||||||||
| 18.45 |