Call for Papers
The Call for Papers for apc|m 2026 is open from September until mid-December. We invite contributions from industry and academia on all aspects of advanced process control and manufacturing effectiveness in the semiconductor and related industries.
Submission Guidelines:
- Please fill out the Word “Abstract Master” in advance.
- Have a speaker photo ready.
- Then go to the submission tool Sessionize and submit your contribution.
- All submissions must be made via Sessionize – please prepare your materials before starting the submission process.
Submit now!
Abstract master
APC|M TOPICS
Process Level APC
- Plasma Based Deposition (PVD, PE-CVD and PE-ALD)
- Plasma etching for Si and compound materials (RIE)
- Classical Deposition (CVD, ALD)
- Plating
- Lithography & Lithography logistic
- Thermal, WET
- CMP
- Epitaxy
- Other unit processes
- Metrology, virtual metrology
- Defect Density Engineering
- Process modelling, simulation, digital twin
- Process control methods at process level, e.g., FDC, Fault Prediction, Run-to-Run Control, Virtual Metrology
Smart Manufacturing
- Digitization, data analytics
- Data quality
- Machine learning & AI
- Digital twin
- Fab level process control methods, R2R
- Yield management
- Factory data analysis
- Equipment integration
- IT infrastructure, IoT, edge-devices, cloud-based systems, quantum computing
- Cybersecurity, data sharing, conversion techniques and blockchain
- Fab level process control methods, e.g., FDC, Fault Prediction, Run-to-Run Control, Virtual Metrology
Manufacturing Effectiveness
- Equipment productivity
- Manufacturing productivity and automation
- Factory modeling and simulation
- Supply chain integration and optimization
- Cost management
- End-of-life equipment challenges
- Material efficiency
- Environment and green manufacturing
- Industry standards, requirements, future needs and roadmaps
Packaging & Smart Integration
- Backend and final test
- Heterogenous Integration
- APC and smart manufacturing solutions in other precision industries such as electronics, pharmaceutical, chemical