Invited Talks
Tomoya Tanaka - Panasonic Corporation
Guest Talk from AEC/APC ASIA:
"Improvement of Overall Equipment Efficiency by Virtual Metrology using Equipment data in Reactive Sputtering of Titanium Nitrid"
Address
Silicon Saxony e. V.
M.-v.-Ardenne-Ring 20 F
01099 Dresden
Phone
+49 (351) 8925-888
Email
weber@apcm-europe.eu
Contact
René Weber
"Improvement of Overall Equipment Efficiency by Virtual Metrology using Equipment data in Reactive Sputtering of Titanium Nitrid"