| 101 |
Cybersecurity Attacks in Semiconductor Supply Chain Environment |
Alireza Esfahani |
Instituto de Telecomunicações (IT) |
| 102 |
Robustness against Covariate Shift of Water Chiller Models for Optimal Energy Management in a SM plant |
Federica Acerbi |
University of Pavia |
| 103 |
Evaluation of Visual Decision Support Systems used in Semiconductor Industry |
Manuela Rauch |
KNOW-CENTER GmbH |
| 104 |
Legacy Control System Replacement |
Christopher Bode |
INFICON |
| 105 |
Machine Learning Techniques for Automated Wafer Health Assessment using Wafer Test Data |
Anja Zernig |
KAI GmbH |
| 106 |
Networking the APC-Systems into a Fab Software Landscape |
Andreas Feustel |
Robert Bosch GmbH - RtP1 |
| 107 |
Dimension Reduction using Feature Selection for Root Cause Analysis |
Peter Czerner |
Elmos Semiconductor AG |
| 108 |
Interactive Stack Wafer Map with Feature Selection Capabilities |
Marcel Kunick |
Elmos Semiconductor AG |
| 109 |
RFID – based Wireless Sensor Network for Semiconductor Manufacturing Equipment to enable Predictive Maintenance |
Aleš Travnik |
CTR Carinthian Tech Reserach AG |
| 110 |
Predictive Pump Monitoring utilizing Deep Learning - A Use Case Study for Cognitive Power Electronics 4.0 |
Martin Schellenberger |
Fraunhofer IISB |
| 111 |
Clustering of product tests for improving multidimensional data analysis and the identification of suspicious devices |
Jenny Bartholomäus |
Infineon Technologies Dresden GmbH |
| 201 |
Sensitivity Enhancement of Plasma Monitoring Signals for Plasma Etching and Deposition Processes by Multivariate Analysis Techniques |
Heeyeop Chae |
Sungkyunkwan University (SKKU) |
| 202 |
Printed 2D sensor for pH measurements – the pH Pen |
Katja Harms |
CTR Carinthian Tech Research AG |
| 203 |
Photoresist Dispense Detection |
Alexander Großer |
Robert Bosch GmbH |
| 204 |
3D Automatic X-Ray Inspection System |
Yoo Yeob Jung |
Nanotech Digital GmbH |
| 301 |
System and method for Throughput Recipe monitor and Capacity degradation detection |
Sara Tosini |
STMicroelectronics |
| 302 |
Statistical Throughput Monitoring For Enhanced deViation dEtection & Recovery |
Giuseppe Fazio |
STMicroelectronics |
| 303 |
Application of the CPPS meta-model for implementation of Industrie 4.0 Administration Shells |
Mario Thron |
Institut f. Automation und Kommunikation e.V. |
| 304 |
An impact evaluation approach for smart factory cases |
Marius Lütkemeyer, Alessandro Sala |
Fraunhofer Austria |
| 305 |
Survey of Wireless Sensors for Sub-Fab Environment |
Michael Davis |
INFICON |
| 306 |
Novel challenges for root cause investigation in semiconductor manufacturing |
Martin Pleschberger |
KAI - GmbH |
| 307 |
An experimental proof of the different granularity levels of automated-generated long-term simulation model |
Thomas Wagner |
TU Dresden |
| 308 |
Imaging based inline monitoring of the demounting process |
Robert Muhr |
Infineon Technologies Austria AG |
| 401 |
Estimating wafer chuck angular velocity from video data |
Gerfried Millner |
Materials Center Leoben Forschung GmbH |
| 402 |
Sensor Integration For Cost Reduction and Avoidance |
Michael Neel |
INFICON |