| Sensitivity Enhancement of Plasma Monitoring Signals for Plasma Etching and Deposition Processes by Multivariate Analysis Techniques |
Heeyeop Chae |
Sungkyunkwan University (SKKU) |
| 3D Automatic X-Ray Inspection System |
Yoo Yeob Jung |
Nanotech Digital GmbH |
| Printed 2D sensor for pH measurements – the pH Pen |
Katja Harms |
CTR Carinthian Tech Research AG |
| Photoresist Dispense Detection |
Alexander Großer |
Robert Bosch GmbH |
| Estimating wafer chuck angular velocity from video data |
Manfred Mücke |
Materials Center Leoben Forschung GmbH |
| Sensor Integration For Cost Reduction and Avoidance |
Michael Neel |
INFICON |
| System and method for Throughput Recipe monitor and Capacity degradation detection |
Sara Tosini |
STMicroelectronics |
| Statistical Throughput Monitoring For Enhanced deViation dEtection & Recovery |
Giuseppe Fazio |
STMicroelectronics |
| Job-shop scheduling with optimal inclusion of work-free night shifts |
Alexander Aschauer |
TU Wien |
| Application of the CPPS meta-model for implementation of Industrie 4.0 Administration Shells |
Mario Thron |
Institut f. Automation und Kommunikation e.V. |
| An impact evaluation approach for smart factory cases |
Andreas Felsberger |
Alpen-Adria Universität Klagenfurt |
| Survey of Wireless Sensors for Sub-Fab Environment |
Michael Davis |
INFICON |
| Novel challenges for root cause investigation in semiconductor manufacturing |
Martin Pleschberger |
KAI - GmbH |
| An experimental proof of the different granularity levels of automated-generated long-term simulation model |
Igor Stogniy |
TU Dresden |
| Cybersecurity Attacks in Semiconductor Supply Chain Environment |
Alireza Esfahani |
Instituto de Telecomunicações (IT) |
| Robustness against Covariate Shift of Water Chiller Models for Optimal Energy Management in a SM plant |
Federica Acerbi |
University of Pavia |
| Evaluation of Visual Decision Support Systems used in Semiconductor Industry |
Alexander Gaal |
Fraunhofer Austria Research |
| Legacy Control System Replacement |
Christopher Bode |
INFICON |
| Machine Learning Techniques for Automated Wafer Health Assessment using Wafer Test Data |
Anja Zernig |
KAI GmbH |
| Networking the APC-Systems into a Fab Software Landscape |
Andreas Feustel |
Robert Bosch GmbH - RtP1 |
| Dimension Reduction using Feature Selection for Root Cause Analysis |
Peter Czerner |
Elmos Semiconductor AG |
| Interactive Stack Wafer Map with Feature Selection Capabilities |
Peter Czerner |
Elmos Semiconductor AG |
| RFID – based Wireless Sensor Network for Semiconductor Manufacturing Equipment to enable Predictive Maintenance |
Christina Hirschl |
CTR Carinthian Tech Reserach AG |
| Predictive Pump Monitoring utilizing Deep Learning - A Use Case Study for Cognitive Power Electronics 4.0 |
Martin Schellenberger |
Fraunhofer IISB |
| Clustering of product tests for improving multidimensional data analysis and the identification of suspicious devices |
Jenny Bartholomäus |
Infineon Technologies Dresden GmbH |
