Accepted Posters

Poster Titel Presented by Company
101 Sensitivity Enhancement of Optical Signals for Plasma Etching Endpoint Detection with Modified Cluster Analysis Methods Seonghyeon Lee Sungkyunkwan University
102 An Enhanced Machine Learning Based Hybrid Metrology Approach Enabling APC in Oxide CMP Dr. Zhuo Chen Onto Innovation
201 Sensor Integration Framework with Interface A Bert Müller Kontron AIS GmbH
202 Industrialization of statistical methods in form of a preproduction analysis tool Valentin Germic Elmos Semiconductor AG
204 Use of AI Computer Vision Methods and Edge Intel Industry 4.0 Framework in the Final Quality Control of Manufactured Kontron Industrial Computer Maik Pertermann Kontron-AIS GmbH
205 Towards the knowledge reuse in the semiconductor manufacturing industry AI Approaches: pitfall and tips Houssam Razouk Infineon Technologies Austria AG/Graz University of Technology
301 Control of hybrid AMHS considering dynamic transport load transfers between vehicles Patrick Boden Technische Universität Dresden
302 Smart Sensor Networks for Predictive Maintenance Dr. Sebastian Rank Technische Universität Dresden
303 Interface Optimization Potentials Concerning Disruptions along the Semiconductor Value Chain Fabian Lindner Hochschule Zittau/Görlitz