Agenda

Poster

Accepted Posters

Poster Titel Presented by Company
101 Cybersecurity Attacks in Semiconductor Supply Chain Environment Alireza Esfahani Instituto de Telecomunicações (IT)
102 Robustness against Covariate Shift of Water Chiller Models for Optimal Energy Management in a SM plant Federica Acerbi University of Pavia
103 Evaluation of Visual Decision Support Systems used in Semiconductor Industry Manuela Rauch KNOW-CENTER GmbH
104 Legacy Control System Replacement Christopher Bode INFICON
105 Machine Learning Techniques for Automated Wafer Health Assessment using Wafer Test Data Anja Zernig KAI GmbH
106 Networking the APC-Systems into a Fab Software Landscape Andreas Feustel Robert Bosch GmbH - RtP1
107 Dimension Reduction using Feature Selection for Root Cause Analysis Peter Czerner Elmos Semiconductor AG
108 Interactive Stack Wafer Map with Feature Selection Capabilities Marcel Kunick Elmos Semiconductor AG
109 RFID – based Wireless Sensor Network for Semiconductor Manufacturing Equipment to enable Predictive Maintenance Aleš Travnik CTR Carinthian Tech Reserach AG
110 Predictive Pump Monitoring utilizing Deep Learning - A Use Case Study for Cognitive Power Electronics 4.0 Martin Schellenberger Fraunhofer IISB
111 Clustering of product tests for improving multidimensional data analysis and the identification of suspicious devices Jenny Bartholomäus Infineon Technologies Dresden GmbH
201 Sensitivity Enhancement of Plasma Monitoring Signals for Plasma Etching and Deposition Processes by Multivariate Analysis Techniques Heeyeop Chae Sungkyunkwan University (SKKU)
202 Printed 2D sensor for pH measurements – the pH Pen Katja Harms CTR Carinthian Tech Research AG
203 Photoresist Dispense Detection Alexander Großer Robert Bosch GmbH
204 3D Automatic X-Ray Inspection System Yoo Yeob Jung Nanotech Digital GmbH
301 System and method for Throughput Recipe monitor and Capacity degradation detection Sara Tosini STMicroelectronics
302 Statistical Throughput Monitoring For Enhanced deViation dEtection & Recovery Giuseppe Fazio STMicroelectronics
303 Application of the CPPS meta-model for implementation of Industrie 4.0 Administration Shells Mario Thron Institut f. Automation und Kommunikation e.V.
304 An impact evaluation approach for smart factory cases Marius Lütkemeyer, Alessandro Sala Fraunhofer Austria
305 Survey of Wireless Sensors for Sub-Fab Environment Michael Davis INFICON
306 Novel challenges for root cause investigation in semiconductor manufacturing Martin Pleschberger KAI - GmbH
307 An experimental proof of the different granularity levels of automated-generated long-term simulation model Thomas Wagner TU Dresden
308 Imaging based inline monitoring of the demounting process Robert Muhr Infineon Technologies Austria AG
401 Estimating wafer chuck angular velocity from video data Gerfried Millner Materials Center Leoben Forschung GmbH
402 Sensor Integration For Cost Reduction and Avoidance Michael Neel INFICON