Agenda
15:30 - 16:00
“antiPilo AI”: First-Time-Right Lithography in a High-Mix, Low-Volume FAB using a Machine Learning boosted R2R controller
Martin Schwarz | X-FAB Dresden GmbH & Co. Kg
16:00 - 16:30
A Digital Twin of a real fab – how to create it?
Torsten Thieme | Deaxo GmbH