Agenda
Session Chair: Gerd Fischer
15:45 - 16:15
FDC System Integration and Application for Opto Semiconductor Epitaxy Tools
Thomas Bauer | ams-OSRAM Group
16:15 - 16:45
Combining Physical and Virtual Metrology for Adaptive Process Control
Christian Hörr | ZEISS Digital Innovation
16:45 - 17:15
Yield management Equipment Performance Optimization for Yield improvement
Dmitrii Fomin & Massimo Orazio Spata (by remote) | Stmicroelectronics