Conference

Agenda

The conference program is organized with presentations/talks and poster sessions in parallel. Additionally, several half-day technical tutorials will be offered to you.

The conference will be an excellent opportunity to promote your company's products.

Usergroup Meetings are an easy way to meet your customers. The schedule of events will provide plenty of time to get in contact with your colleagues, customers and suppliers.

Tuesday, March 28

8:00 - 13:00

Registration

Entrance Area - Level 0

9:00 - 12:15
13:00 - 13:30

Opening & Welcome

 

Auditorium B - Level 1

Opening

Martin Schellenberger (Fraunhofer IISB) & Jochen Kinauer (CamLine)

Welcome

Welcome by the mayor of Bruges - Mr. Dirk De fauw

13:30 - 14:15

Invited Talk

 

Auditorium B - Level 1

GaN, BelGaN & GaN ValleyTM: a paradigm shift in power semiconductors.

Dr. Marnix Tack, CTO and VP Business Development / BelGaN

14:15 - 14:30

Short break to change rooms

14:30 - 16:00

SESSION 1 - PART 1

sponsored by:

Auditorium B - Level 1

Session Chair: Bert Müller

1.2 Future Innovation Process in Semiconductor Manufacturing Towards Sustainable & Resilient Production & Products (FIRes)
Germar Schneider / Infineon Technologies Dresden GmbH & Co. KG

1.3 A Modern Architecture and Methodology for Automating Equipment Process Control using AI/ML

Jon Holt / PDF Solutions

SESSION 2 - PART 1

sponsored by:

Meeting 1&2 - Level 3

Session Chair: Alan Weber

2.5 An Innovative Wet Process Concentration Monitoring Concept in a High Volume Semiconductor Factory
Lorenz Konopatzky / Infineon

2.2 Novel Time-of-Flight Residual Gas Analyzer (TOF-RGA) for in situ Real-time Process Monitoring

Lukas Hofer / Spacetek

2.3 Epi process modeling for uniformity R2R

André Horn / Infineon

16:00 - 16:30

Coffee Break

Conference Area - Level 4

sponsored by:



16:30 - 16:50

Sponsor Talk - Flanders Investment & Trade

 

Auditorium B - Level 1

The Flanders Semiconductor Initiative

Lou Hermans, Managing Director HCM & Cluster Manager Flanders Semiconductors


16:50 - 18:00

Poster & Exhibitor Presentation

 

Auditorium B - Level 1

Poster Presentation

Session Chair: Martin Schellenberger

P201 IC surface anomaly detection and localization with Variational Autoencoder

Minh Khai Le / Elmos Semiconductor SE

P202 K Means Clustering for solving matching problems in Semiconductor factories

Vishali Ragam / Applied Materials

P203 Turn Grey SPC Charts into Colorful Insights with the Help of Feature Selection
Steven Hoheisel / X-FAB Dresden GmbH & Co. KG

P204 Analysis of Optical Emission Spectroscopy Signals for Plasma Process Monitoring and Fault Detection Classification with Principal Component Analysis

Heeyeop Chae / SKKU

P301 Automation and Digitalization along the Supply Chain for Power Semiconductors from Wafer Supplier to Backend Manufacturer
Fabian Lindner / Zittau/Görlitz University of Applied Sciences

P302 The Impact of Tool Allocation and Dedication on Cycle Time
Felipe Lipp Bregolin / Applied Materials

Exhibitor Presentation

Session Chair: Jochen Kinauer

Applied Materials
INFICON GmbH
Fraunhofer ENAS
Tohoku University
Gauss Labs
SPEA GmbH
KDT JU
POSAS GmbH
SENTECH Gesellschaft für Sensortechnik mbH
Cimetrix Incorporated
EPoSS

ASCENT+

Infraserv Vakuumservice GmbH

18:00 - 19:30

Poster Reception

Conference Area - Level 4

sponsored by:


Wednesday, March 29

8:00 - 9:00

Registration

Entrance Area - Level 0

9:00 - 9:30

Opening & Sponsor Talks

 

Auditorium B - Level 1

Opening:

Martin Schellenberger (Fraunhofer IISB) & Jochen Kinauer (CamLine)

Sponsor Talks:

 

 

Unifying Process Control to Disrupt Manufacturing Principles

Christopher Reeves, Global Product Manager, E3 Platform, Applied Materials

9:45 - 10:30
10:30 - 11:00

Coffee Break

Conference Area - Level 4

sponsored by:


11:00 - 12:30

SESSION 1 - PART 2

sponsored by:

Auditorium B - Level 1

Session Chair: Bert Müller

1.4 Hierarchical variance analysis of solar cell production using machine learning and numerical simulations

Bernhard Klöter / Wavelabs Solar Metrology


1.5 FDC Real Time Monitoring AMCs of PICARRO analytical system  
Martina Scollo / STMicroelectronics

1.6 Adopting cybersecurity standards for semiconductor factories
Doug Suerich / PEER Group Inc.

SESSION 3 - PART 1

sponsored by:

Meeting 1&2 - Level 3

Session Chair: Jochen Kinauer

3.1 Validating the technical risk of product transfer or technology transfer between heterogenous manufacturing sites
Roland Willmann / Carinthia University of Applied Sciences

3.2 Predictive Equipment Health Based on Hidden Markov Model and Production Scheduling
Jakey Blue / National Taiwan University

3.3 BIM for Building Construction Operations to create the fundamentals for a Digital Twin

Torsten Thieme / Deaxo

12:30 - 14:00

Lunch

Conference Area - Level 4

sponsored by:

14:00 - 15:30

SESSION 1 - PART 3

sponsored by:

Auditorium B - Level 1

Session Chair: Ulf Seidel

1.7 Deployment of SPC 4.0: ML-based OOC detection with integrated in-line/on-line multivariate root-cause analysis
Ilham Rabhi , Kalle Ylä-Jarkko / École Nationale Supérieure des Mines de Saint-Étienne

1.8 Statistical path modelling of semiconductor manufacturing process data
Geert van Kollenburg / Eindhoven University of Technology

1.9 Seeing is Understanding: Improving the Visibility into Smart Manufacturing Operations Through Advanced Visualization Technology
Alan Weber / Cimetrix

SESSION 2 - PART 2

sponsored by:

Meeting 1&2 - Level 3

Session Chair: Gerd Fischer

2.4 Optical in-situ control with sub-nm precision for endpoint detection in atomic layer etching for GaN MISHEMT structures
Kolja Haberland / LayTec AG


2.1 An IoT Solution for in-situ Dispense Detection and Photoresist Consumption Control in Lithography Coater Tools
Yvonne Bergmann / Robert Bosch

2.6 Chemical flow monitoring system
Natalina Di Stefano / STMicroelectronics & Daniele Lavalle / Techno Fittings

15:30 - 16:00

Coffee Break

Conference Area - Level 4

sponsored by:


16:00 - 17:00

SESSION 1 - PART 4

sponsored by:

Auditorium B - Level 1

Session Chair: Martin Schellenberger

1.10 Inconvenient Truths... and Their Discovery
Robert McCafferty / RHM Consulting


1.11 Visual Inspection System for Predictive Maintenance of Overhead Transportation Vehicles
Christian Hörr / Carl Zeiss Digital Innovation GmbH & Hans Klingstedt / Smart Systems Hub

SESSION 3 - PART 2

sponsored by:

Meeting 1&2 - Level 3

Session Chair: Ulf Seidel

3.4 Automatic Line Balance Control using a Digital Twin Production System with an Optimizing Factory Scheduler
Eric Wiedemann / Inficon

3.5 A Multi-Objective Simulation-Based Scheduling Approach for Wafer Fab Operations
Peter Lendermann / D-SIMLAB

17:00 - 18:00

Break/End of Conference Day

18:00 - 22:00

Conference Dinner

Dinner & Brewery visit


De Halve Maan (Straffe Hendrik) Brewery


The journey begins in the brewing hall where all the beers are brewed. The tour continues and you’ll discover the many brewing installations that have been used over the past centuries. At the brewery's rooftop you can enjoy a 360° view over the city center of Bruges. At the end of your journey, we offer you an unfiltered Brugse Zot Blond, Brugse Zot Dubbel or Straffe Hendrik Tripel.

Inside the brewery you’ll find the restaurant where our evening dinner will take place. It has a very cosy and authentic atmosphere. Enjoy the tasty specialty beers or delicious home-made meals. Discover the unique and historical setting with a unique view across the brewing hall. 

sponsored by:

Thursday, March 30

8:30 - 9:00

Registration

In front of Auditorium - Level 1

9:00 - 9:45

Opening & Keynote

 

Auditorium B - Level 1

Opening

Martin Schellenberger (Fraunhofer IISB) & Jochen Kinauer (CamLine)

Keynote

A Silicon Symphony: Overview on industry and market developments for the European semiconductor industry

Frank Bösenberg / Silicon Saxony

9:45 - 10:15

SESSION 1 - PART 5

sponsored by:

Auditorium B - Level 1

Session Chair: Alan Weber

1.12 Reliable, Robust, and Scalable Virtual Metrology for Process Control in High Volume Manufacturing
Brendon Choe / Gauss Labs Inc.

SESSION 2 - PART 3

sponsored by:

Meeting 1&2 - Level 3

Session Chair: Bert Müller

2.7 Spectral Clustering Algorithm for Real-Time Plasma Etching Process Monitoring using Optical Emission Spectra
Seonghyeon Lee / Sungkyunwan University (SKKU)

10:15 - 11:00

Coffee Break

Conference Area - Level 4

sponsored by:


11:00 - 12:30

SESSION 1 - PART 6

sponsored by:

Auditorium B - Level 1

Session Chair: Gerd Fischer

1.13 minds.ai Maestro: Optimized fab scheduling using reinforcement learning
Jasper van Heugten / minds.ai

1.14 Can empirical physics models improve machine learning performance using planarization data?

Tom Rothe / Fraunhofer ENAS

1.15 CSAM anomaly detection with AI
Jason Zi Jie Chia / Elmos

SESSION 3 - PART 3

sponsored by:

Meeting 1&2 - Level 3

Session Chair: Ulf Seidel

3.6 SelfMade Scheduler for Lithography
Carina Malinowska / X-FAB Dresden GmbH & Co. KG

3.7 Smart from the Ground Up: Facilities Control and Integration
Christopher Bode / Inficon



3.8 Equipment Standardization in the field of MEMS Testing

Oleg Fotteler / Spea

12:30 - 14:00

Lunch

Conference Area - Level 4

sponsored by:

14:00 - 14:45

Invited Talk

Auditorium B - Level 1

tba

14:45 - 15:30

Award Ceremony & Closing

Auditorium B - Level 1

16:00 - 18:30

Further conference days