Conference
Agenda
Agenda
From April 16-18, you can expect three exciting days filled with inspiring presentations and keynotes, groundbreaking innovations and countless opportunities to network with industry and sience experts from around the world.
Here you can download the agenda ... AGENDA
Tuesday, April 16
Registration
CinemaxX Foyer
Tutorial
Movie theater 7
Alan Weber & Jon Holt | Cimetrix by PDF Solutions
Opening & Welcome
Movie theater 8
Opening
Martin Schellenberger (Fraunhofer IISB) & Jochen Kinauer (CamLine)
Invited Talk
Movie theater 8
Session Chair: Martin Schellenberger
MaiMa autofrei - A digital quality gate for tool requalification after maintenance employing MaiMa and Space
Yvonne Bergmann | Robert Bosch GmbH
SESSION 1 - PART 1
sponsored by:
Movie theater 8
Session Chair: Bert Müller
1.1 ICP-etching of GaN HFET structures: real time statistical process control of nm-thick GaN layers by means of end point detection
Anthony Martinez | LayTec AG
1.2 Enabling Higher Resolution Measurement to Support Zone Control
John Mc Manus | Nova Ltd
SESSION 3 - PART 1
sponsored by:
Movie theater 7
Session Chair: Thomas Müller
3.1 Industry 4.0 boosts predictive maintenance for semiconductor testers
Oleg Fotteler | SPEA GmbH
3.2 Models for Gas Flow Reduction
Michael Klick | Plasmetrex
Coffee Break
CinemaxX Foyer
sponsored by:
SESSION 1 - PART 2
sponsored by:
Movie theater 8
Session Chair: Bert Müller
1.3 “antiPilo AI”: First-Time-Right Lithography in a High-Mix, Low-Volume FAB using a Machine Learning boosted R2R controller
Martin Schwarz | X-FAB Dresden GmbH & Co. Kg
A Digital Twin of a real fab – how to create it?
Torsten Thieme | Deaxo GmbH
SESSION 2 - PART 1
sponsored by:
Movie theater 7
Session Chair: Thomas Müller
2.1 Sensor Matching Application Concept Using Cloud Storage, Cloud Analytics and Computing Services
Frank Wagenbreth | Globalfoundries
2.2 "Harnessing the Power of Event Sequence Analysis for Semiconductor Smart Manufacturing"
Alan Weber | Cimetrix by PDF Solutions
Sponsor Talks
Movie theater 8
Session Chair: Martin Schellenberger
Sponsor Talks:
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Poster & Exhibitor Presentation
Movie theater 8
Exhibitor Presentation
Session Chair: Martin Schellenberger
| Number | Exhibitor |
| 1 | SPEA GmbH |
| 2 | camline GmbH |
| 3 | Brooks Instrument GmbH |
| 4 | Chroma ATE Europe B.V. |
| 5 | Gauss Labs |
| 6 | MAFU Robotics GmbH |
| 7 | SYSTEMA Systementwicklung Dipl.-Inf. Manfred Austen GmbH |
| 8 | teradata |
| 9 | KRÜSS GmbH |
| 10 | Wonik IPS Co.,Ltd |
| 11 | Electron Mec |
Poster Presentation
| Poster | Presenter |
| P101 | A New Type of Flow Ratio Controller for Semiconductor Processing Mohamed Saleem | Illinois Tool Works |
| P102 | Improving measurement accuracy in conformal thin film metrology for 3D semiconductor devices Thomas Werner | Chipmetrics Oy |
| P103 | Maximizing sputtering tool requirements of optical interference filters on chips |
| P201 | AI safety in manufacturing facilities: current regulations and research aspects towards risk assessment Franziska Wolny | BAuA Bundesanstalt für Arbeitsschutz und Arbeitsmedizin (BAuA) |
| P202 | Vacuum Pump Lifetime Prediction Concept Using LSTM Type Neural Network and Transfer Learning Sharath Kumar Soudamalla | Globalfoundries |
| P203 | Building a process engineering fabric: Synergistic Human + AI-augmented process characterization and optimization |
| P204 | Root Cause Analysis using Optical Emission Spectroscopy with Principal Component Analysis in Plasma Processes Eunchong Park | Sungkyunkwan University (SKKU) |
| P205 | Time Series ML-based changepoints detection for energy efficiency analytics Pavel Filonov | HiPer it! |
| P206 | Long-term considerations of APC data Susanne Möller | TDK-Micronas |
| P207 | Virtual Metrology Model for Partially Labelled Data for Plasma Etching Process Mudassir Ali Sayyed | Fraunhofer ENAS, TU Chemnitz |
| P208 | Virtual Metrology for Silicon Carbide Epitaxy Wes Smith | Galaxy Semiconductor & Daniele Pagano | STMicroelectronics |
| P209 | Data analytics for GaN-based Wafers |
| P301 | Automated Image-Based Structural Analysis Using AI Algorithms for Accurate Size Determination and Anomaly Detection Minh Khai Le | Elmos Semiconductor Se |
| P302 | Analyzing tool performance using operating curves Gero Grau | Inficon |
| P303 | Machine Learning driven Optimization of Overhead Hoist Transport System Control in Semiconductor Industry Patrick Boden | TUD Dresden University of Technology |
| P304 | Empowering Creativity and Innovation in Semiconductor Manufacturing Gerhard Luhn | SYSTEMA GmbH |
| P305 | Sustainability is the new normal in high-volume semiconductor frontend production: Balancing WIP flow for energy availability, cost and peak consumption Hajo Terbrack | SYSTEMA GmbH |
Poster Reception
CinemaxX Foyer
sponsored by:
Wednesday, April 17
Registration
CinemaxX Foyer
Opening
Movie theater 8
Martin Schellenberger (Fraunhofer IISB) & Jochen Kinauer (CamLine)
Invited Talk
Movie theater 8
Session Chair: Jochen Kinauer
Novel approach to master the challenges of run-to-run control in high-mix low-volume production – Part 3
Ulf Seidel | Infineon Technologies Dresden
Coffee Break
CinemaxX Foyer
sponsored by:
SESSION 2 - PART 2
sponsored by:
Movie theater 8
Session Chair: Christian Knöll
2.3 Machine-Learning-based Classification of Via Defects in SEM-Images.
Abdelmalek Cherchari | Fraunhofer Institute of Electronic Nano Systems ENAS, Technische Universität Chemnitz
2.4 Unpacking Wafer Analysis Complexity: Using Siamese Networks for a Novel Wafer Map Fingerprint Comparability Approach
Christian Weber | Institute of Knowledge Based Systems and Knowledge Management, University of Siegen
2.5 R&D³: a modern data stack for imec researchers
Wim Vancuyck | Imec
2.6 Quantum Computing in Semiconductor Manufacturing – Potentials and Outlook
Christoph Eichhammer | Fraunhofer Institute for Integrated Systems and Device Technology (IISB)
SESSION 3 - PART 2
sponsored by:
Movie theater 7
Session Chair: Ulf Seidel
3.3 Unit process & equipment productivity shock sentinel on evg wtw bonding system robot handling
Marco Cartotti | STMicroelectronics & Daniele Lavalle | Technofitting
3.4 New generation of equipment/host communication as an enabler for data platforms, AI and digital twin
Marco Grafe | Carl Zeiss Digital Innovation GmbH
3.5 Digitalisation & AI for Industry 5.0 Applications to Make Semiconductor Manufacturing Sustainable
Germar Schneider | Infineon Technologies Dresden Gmbh & Co. KG
3.6 From dispatching to autonomous scheduling: a case study at a real wafer fab
Semya Elaoud | Flexciton Ltd.
Lunch
CinemaxX Foyer
sponsored by: 
Young Talent Session
Movie theater 8
Young Talent Presentation
Session Chair: Martin Schellenberger
T1 In-Wafer Etch Process Control Based on real-time PI-VM under MFC aging scenario in Ar/SF6/O2 VHF-CCP
Ji-Won Kwon | Seoul Nat'l Univ.
T2 Machine Learning Prediction Models for Generic Run-to-Run Control in High-Mix Semiconductor Industry
Lucile Terras | EMSE
T3 CMP Process Modelling using Machine Learning Techniques
Hossam Elwan | Vishay Siliconix Itzehoe GmbH
T4 Expertise-based optimization of yield prediction on logistic delivery grids
Stefan Stroka | ams OSRAM Group & LMU Munich
T5 Optimizing Process Capability and Cycle Time through Virtual Metrology
Leonard Yeo | Micron Technology
Coffee Break
CinemaxX Foyer
sponsored by:
SESSION 2 - PART 3
sponsored by:
Movie theater 8
Session Chair: Gerd Fischer
2.7 FDC System Integration and Application for Opto Semiconductor Epitaxy Tools
Thomas Bauer | ams-OSRAM Group
2.8 Combining Physical and Virtual Metrology for Adaptive Process Control
Christian Hörr | ZEISS Digital Innovation
2.9 Yield management Equipment Performance Optimization for Yield improvement
Dmitrii Fomin & Massimo Orazio Spata (by remote) | Stmicroelectronics
SESSION 3 - PART 3
sponsored by:
Movie theater 7
Session Chair: Robert McCafferty
3.7 A Simulation and Evaluation Platform for the Training of a Reinforcement Learning Enabled Dispatch Agent to Reduce Fab Cycle Time
Peter Lendermann | D-SIMLAB Technologies GmbH & Patrick Stöckermann | Infineon Technologies Dresden
3.8 Jointly optimizing intralogistics, WIP flow and stocker management in a segregated high-automation semiconductor font-end fab
Holger Brandl | SYSTEMA GmbH
3.9 Development of a Concept for a Dynamic Dispatching Method Based on a Data-Driven Classification of Manufacturing Scenarios: Start at an Academic Level
Rocky Telatko | Hochschule für Technik und Wirtschaft Dresden
Break/End of Conference Day
Conference Dinner
Conference dinner @ MS LOUISIANA STAR
The four chimneys smoke, the paddle wheel ripples, the steam siren wails. Anyone strolling along the banks of the Elbe cannot fail to notice the MS LOUISIANA STAR, one of the most beautiful event ships in Europe! With its galleries, arches and columns, it exudes opulent Mississippi flair. The MS LOUISIANA STAR is exclusively reserved for our conference dinner on 17 April. Enjoy an extensive harbour cruise with food and drink and get into conversation with the other conference participants.
The conference dinner is already included in your conference ticket. Of course, a bus shuttle to and from our venue is also included. We look forward to this unforgettable evening with you.
sponsored by:
Thursday, April 18
Registration
CinemaxX Foyer
Opening
Movie theater 8
Martin Schellenberger (Fraunhofer IISB) & Jochen Kinauer (CamLine)
Keynote Talk
Movie theater 8
Session Chair: Jochen Kinauer
Technologies in Generative AI and the Future of Coding
Invited Talk
Movie theater 8
Session Chair: Jochen Kinauer
Rethinking Education and Training for nowadays semiconductor manufacturing by adapted Bauhaus Education Philosophy
Coffee Break
CinemaxX Foyer
sponsored by:
SESSION 2 - PART 4
sponsored by:
Movie theater 8
Session Chair: Alan Weber
2.10 Smart device on facilities to prevent unscheduled facilities interruption
Giuseppe Fazio | STMicroelectonic
2.11 Getting and staying ahead of the bad guys, an industry plan for cybersecurity
Doug Suerich | PEER Group
SESSION 3 - PART 4
sponsored by:
Movie theater 7
Session Chair: Gerd Fischer
3.10 Process and equipment performance optimization
Pietro Petruzza | STMicroelectronics
3.11 AI-Enhanced Digital Twin Architecture and local dispatching methods for yield improvement in a microelectronics facility
Roberto Rosario Corsini and Marco Stefano Scroppo | STMicroelectronics
Lunch
CinemaxX Foyer
sponsored by:
SESSION 2 - PART 5
sponsored by:
Movie theater 8
Session Chair: Alan Weber
2.12 Machine Learning and Explainable AI to Manage Process Variabilities and Resource Efficiencies in Semiconductor Manufacturing
Venugopal Ramadasu | Vienna University of Economics and Business
2.13 Optimizing Yield and Process Efficiency in Semiconductor Fabs through AI
Monica McDonnell | teradata
2.14 Stratified Boosting with Adaptive Online Learning for Virtual Metrology at a Massive Scale
Brendon Choe | Gauss Labs Inc.
SESSION 3 - PART 5
sponsored by:
Movie theater 7
Session Chair: Gerd Fischer
3.12 Processing time and machine availability prediction using neural networks
Jasper van Heugten | minds.ai
3.13 Integrating Transport Loads in Production Planning: A Simulation-Driven Approach
Vincent Betker | TU Dresden
3.12 AI powered solutions addressing the semiconductor labor shortage
John Behnke | Inficon
Award Ceremony & Closing
Movie theatre 8
Martin Schellenberger (Fraunhofer IISB) & Jochen Kinauer (Camline)